JPH01157154U - - Google Patents
Info
- Publication number
- JPH01157154U JPH01157154U JP5152388U JP5152388U JPH01157154U JP H01157154 U JPH01157154 U JP H01157154U JP 5152388 U JP5152388 U JP 5152388U JP 5152388 U JP5152388 U JP 5152388U JP H01157154 U JPH01157154 U JP H01157154U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- magnetic field
- coils
- deflection device
- current magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 10
- 230000035515 penetration Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 230000002265 prevention Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5152388U JPH01157154U (en]) | 1988-04-19 | 1988-04-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5152388U JPH01157154U (en]) | 1988-04-19 | 1988-04-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01157154U true JPH01157154U (en]) | 1989-10-30 |
Family
ID=31277545
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5152388U Pending JPH01157154U (en]) | 1988-04-19 | 1988-04-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01157154U (en]) |
-
1988
- 1988-04-19 JP JP5152388U patent/JPH01157154U/ja active Pending